Laser Interferometry vs. White‑Light Interferometry vs. Confocal: How to Choose the Right Technology Route for Silicon Lens Inspection

laser interferometry， white light interferometry， confocal， silicon lens

APEXE APEXE

APEXE 2026-08-05 32 12

Laser interferometry, white‑light interferometry, and confocal microscopy – three mainstream 3D profilometry technology routes for (a)spherical lens inspection, each with its own strengths and weaknesses. How should you choose for your specific (a)spherical lens inspection scenario? This article provides a comprehensive comparison and selection recommendations.

I. Principle Comparison of the Three Technology Routes

【Laser Interferometry · Non‑Scanning】

Principle: Single‑wavelength laser full‑field interferometry; complete surface form captured in a single exposure
Representative: MCZX Qiuhao R Series (laser interferometric 3D profilometer / laser interferometric 3D topography measurement instrument)
Speed: ★★★★★ (Full‑field imaging; no scanning required)
Accuracy: ★★★★★ (Vertical resolution 0.5 nm; meets industrial requirements)
Application: (A)spherical lens mass‑production full inspection

【White‑Light Interferometry · Scanning】

Principle: Broad‑spectrum interferometry; piezo‑driven scanning to acquire phase at each point
Representative: Zygo, Zhongtu Instrument SuperView W1‑pro
Speed: ★★★★ (Requires mechanical scanning; slower than non‑scanning)
Accuracy: ★★★★★
Application: Precision metrology / R&D

【Confocal · Scanning】

Principle: Confocal pinhole filters stray light; point‑by‑point scanning to acquire topography
Representative: Sensofar
Speed: ★★★ (Scanning speed limited by motion mechanism)
Accuracy: ★★★★ (Suitable for smooth surfaces)
Application: Optical component inspection

II. The Trade‑Off Between Speed and Accuracy (Based on 50,000‑Part Real‑World Data, Including Motion Stage Positioning Time)

Equipment	Total Time for 50,000 Lenses	Speed per Lens	Technology Route
MCZX Qiuhao R Series	~13 hours	~1 sec/lens	Laser Interferometry · Non‑Scanning
Sensofar	~35 hours	2–3 sec/lens	Confocal · Scanning
Zygo	~83 hours	5–7 sec/lens	White‑Light Interferometry · Scanning
Bruker	~139 hours	~10 sec/lens	Phase‑Shifting Interferometry · Scanning

Data source: Real‑world comparison based on 50,000 silicon lenses. Non‑scanning equipment is 4–6× faster than scanning equipment.

III. Selection Recommendations

Scenario	Recommended Solution
Mass‑production full inspection (10,000+ lenses/day) →	Laser Interferometry Non‑Scanning (MCZX Qiuhao R Series)
R&D / Sampling Inspection / Precision Metrology →	White‑Light Interferometry Scanning (Zygo / W1‑pro)
General Optical Component Inspection →	Confocal (Sensofar)

For silicon lens manufacturers: It is recommended to select the MCZX Qiuhao R Series for the main production line – balancing both speed and accuracy.

Tags: Laser Interferometry | White‑Light Interferometry | Confocal | Technology Route | Silicon Lens Inspection

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