Page Description:
Qiuhao R Series (R300/R500) Laser Interferometric 3D Surface Profilometer, specifically designed for wafers, microlenses, glass V-grooves, precision optics, and materials inspection. Full-field single-shot imaging with sub-nanometer precision, delivering efficiency far surpassing traditional scanning-based solutions. Supports comprehensive analysis including roughness, step height, film thickness, scratches, and more.

Qiuhao R300 Laser Interferometric 3D Profilometer	Qiuhao R500 Laser Interferometric 3D Profilometer

I. Core Product Value Proposition
Qiuhao R Series Laser Interferometric 3D Profilometer (3D Surface Metrology System)
Proprietary Full-Field Single-Shot Imaging Technology — Redefining Micro-Nano Inspection Efficiency

• Efficiency Revolution: Single-shot acquisition captures full-field data; inspection speed at least 6× faster than traditional point-by-point scanning solutions.

• Sub-Nanometer Precision: Vertical resolution up to 0.5nm, precisely capturing nanoscale topographic details.

• Versatile Measurements: Supports comprehensive analysis including 3D topography, roughness, step height, film thickness, scratches, geometric dimensions, and more.

• Broad Material Compatibility: Suitable for silicon, quartz (glass), metals, thin films, and various other materials.

• Rich Applications: Covers inspection needs for wafers, microlenses, glass V-grooves, precision optics, medical devices, cutting tools, and more.

• Wafer-Level Full Inspection: Supports large-travel sample stages for 100% full inspection.

II. Product Description
The Qiuhao R Series (including Qiuhao R300 and Qiuhao R500) is a new-generation laser interferometric 3D surface metrology system (3D profilometer) independently developed by Mingcha Zhixin (Shenzhen) Technology Co., Ltd. Based on advanced laser interferometric full-field single-shot imaging technology, it is specifically designed to meet the high-precision, high-efficiency inspection requirements for micro-nano structured surfaces in optical communications, semiconductors, precision optics, materials science, and advanced manufacturing.

1. Working Principle & Technological Breakthrough
Traditional optical profilometers (such as white light interferometers and confocal microscopes) rely on point-by-point or frame-by-frame scanning to reconstruct 3D images. Their "repetitive scanning" workflow results in slow inspection speeds and low efficiency, making them inadequate for batch full-inspection requirements in modern manufacturing.

The Qiuhao R Series fundamentally revolutionizes this process. It employs laser interferometric full-field single-shot imaging technology, capturing interference patterns across the entire field of view in a single exposure, and reconstructs the 3D surface topography through high-speed algorithms. This "single-shot" mechanism delivers a qualitative leap in inspection speed, reducing single measurement time from traditional seconds to tens of seconds down to as fast as 1 second — an efficiency improvement of at least 6×. It truly transitions high-precision 3D topography inspection from the era of "sampling inspection" to the era of "full inspection."

2. Performance & Precision Specifications
While achieving high-speed inspection, the Qiuhao R Series maintains industry-leading precision levels:

• Nanometer-Level Resolution: Optical lateral resolution reaches 0.5μm, with vertical resolution up to 0.5nm, clearly resolving sub-micron scratches, nanoscale form deviations, and other extremely small defects.

• Broad Measurement Range: Maximum vertical measurement range per shot reaches 200μm, covering everything from ultra-smooth polished surfaces (Ra < 0.1nm) to micro-nano structures with significant topography variations (such as microlens arrays and etched grooves).

• Powerful Analysis Functions: The accompanying professional analysis software enables one-click automatic evaluation and output of dozens of parameters, including 3D topography, roughness, step height, film thickness, scratch defects, and geometric dimensions.

3. Broad Material & Product Applicability
The Qiuhao R Series offers excellent material versatility, enabling direct measurement without complex sample preparation:

• Semiconductor & Optical Communication Materials: Silicon wafers, quartz (glass) wafers, photoresist, metal electrodes, etc.

• Precision Optical Materials: Various optical glasses and crystalline materials.

• Metal & Thin Film Materials: Copper foil, aluminum foil, coatings, polymer films, etc.

Based on this superior material compatibility, the system is applicable to the following typical products:

• Wafers: Global roughness and local topography of silicon photonic wafers and compound semiconductor wafers.

• Micro-Nano Optical Components: Microlens arrays, aspheric/spheric lenses, diffractive optical elements (DOE), glass V-grooves.

• Precision Components: Ultra-smooth optical mirrors, MEMS microstructures, semiconductor package bumps.

• Industrial Products & Medical Devices: Precision cutting tools, cardiovascular stents, metal stampings, display module components.

4. Core Value & Application Benefits

• Improved Yield: Through 100% full inspection, completely eliminates defective product outflow, minimizing potential yield risks and quality costs.

• Accelerated Production: Inspection efficiency perfectly matches production line takt time, eliminating quality inspection bottlenecks and facilitating rapid capacity ramping.

• Process Optimization: Detailed inspection data and SPC statistical analysis capabilities provide precise feedback to R&D and process engineers, accelerating process iteration and optimization.

In summary, the Qiuhao R Series is not just a high-precision measurement instrument, but an intelligent inspection solution that safeguards your production quality and drives efficiency transformation.

III. Core Product Advantages

(1) Efficiency Revolution: From Sampling to Full Inspection
In micro-nano manufacturing, efficiency is a critical bottleneck. The Qiuhao R Series employs full-field single-shot imaging technology, acquiring full-field 3D data in a single capture without time-consuming scanning. Using a production inspection scenario of 50,000 (aspheric) lenses as an example, actual measured data comparison is as follows:

Data source: Actual production comparison based on 50,000 (aspheric) lenses.

Conclusion: With the Qiuhao R Series, you can reduce product inspection time from several days to half a day, truly achieving 100% high-precision quality control while minimizing potential yield risks.

(2) Sub-Nanometer Precision: High Speed and High Precision Combined

• Ultra-High Resolution: Optical lateral resolution of 0.5μm and vertical resolution of 0.5nm, clearly identifying microscopic defects (such as nanoscale form deviations and sub-micron scratches) that traditional equipment often misses.

• Broad Range: Maximum measurable vertical range of 200μm, covering various topographies from ultra-smooth surfaces to complex micro-nano structures.

(3) Comprehensive Measurement & Analysis Capabilities
One-click completion of the following measurements and analyses:

• 3D Topography: Form deviation (RMS), radius of curvature (ROC), aspheric K-factor, sagitta height, flatness.

• Roughness: Surface roughness (Sa/Sq/Sz/Sk, etc.).

• Step Height & Film Thickness: Step height, film thickness.

• Defect Detection: Scratches, chipping, contamination.

• Geometric Dimensions: Groove depth, line width, V-groove angle, etc.

(4) Intelligent Batch Measurement Software

• Automated Measurement: Supports matrix-style measurement, full-inspection site import, and other automated measurement modes. With Mark point automatic recognition and correction, enables unattended batch inspection.

• Smart Yield Management: Automatically generates yield distribution maps, supports automatic binning, and exports data in CSV/Excel/PDF formats, providing comprehensive data support for process improvement.

(5) Exceptional Value & Proactive Service

• Provides competitive pricing while matching top international performance standards.

• After-sales commitment of 24-hour online response, plus proactive scheduled on-site inspection and maintenance services to ensure long-term stable operation.

IV. Technical Specifications & Performance Parameters

Note: The above data are sourced from Mingcha Zhixin laboratory tests.

V. Application Fields & Typical Scenarios

Precision Optics

• Wafer-Level Optics: Roughness and topography measurement of silicon photonic wafers, glass wafers, and quartz wafers.

• Micro-Nano Lenses: Comprehensive parameter inspection of microlens arrays and aspheric/spheric lenses.

• Key Components: 3D topography and defect inspection of glass V-grooves, optical mirrors, and diffraction gratings.

• Ultra-Smooth Surfaces: Roughness analysis of ultra-smooth mirrors; scratch/chipping detection on glass.

Materials Science

• Metals: Surface topography and roughness of copper foil, aluminum foil, and metal substrates.

• Coatings & Thin Films: Coating step height and film thickness uniformity measurement.

• Novel Materials: Micro-nano structure analysis of ceramics, polymers, and other surfaces.

LCD/Display

• Backlight Modules: Microstructure inspection of light guide plates and diffuser sheets.

• Display Modules: Surface defect and scratch analysis of panels.

• OLED Modules: Film thickness and uniformity measurement of organic light-emitting layers.

Medical Devices & Precision Manufacturing

• Cardiovascular Stents: Stent surface topography and coating uniformity inspection.

• Precision Cutting Tools: Rake face and flank face wear measurement and contour profiling.

• MEMS Devices: Microstructure step height and groove depth analysis.

VI. Frequently Asked Questions (FAQ)

1. Q: What is the difference between the Qiuhao R Series and traditional white light interferometers or confocal microscopes?
A: The biggest difference lies in the imaging principle. Traditional equipment requires point-by-point or frame-by-frame scanning to composite images, resulting in slow speeds. The Qiuhao R Series uses laser interferometric full-field single-shot imaging technology — capturing 3D data across the entire field of view in a single snapshot, with speed improvements of over 6×. This makes it the ideal choice for achieving 100% full inspection.

2. Q: What materials and products can the Qiuhao R Series measure?
A: A very wide range. For materials, it supports silicon, quartz (glass), metals, thin films, and more. For products, it can measure almost any micro-nano structured surface, including wafers, microlens arrays, glass V-grooves, optical mirrors, metal surfaces, coating steps, cardiovascular stents, precision cutting tools, and more.

3. Q: Can the equipment automatically perform batch inspections?
A: Absolutely. The system software supports one-click import of full-inspection measurement sites, coupled with automatic Mark point recognition and coordinated stage movement, enabling unattended fully automated batch measurement, with comprehensive reports including yield distribution and key parameter statistics.

4. Q: What is your after-sales service like?
A: We provide 24-hour online technical support response, along with proactive scheduled on-site inspection and maintenance services to ensure your equipment remains in optimal operating condition.

VII. Get a Quote / Contact Us

Mingcha Zhixin (Shenzhen) Technology Co., Ltd.
Address: Room 1303, Tower T2, Qianhai Financial Center, Puan South Street, Nanshan District, Shenzhen, Guangdong Province, China
WeChat: mczx1303
Tel: 0755-26609876
Email: MCZX@bevs.me
Website: http://www.bevs.me/